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Additional product details

eText: 
ISBN-13 9780132497398ISBN-10 0132497395
Print: 
ISBN-10 0132497360ISBN-13 9780132497367
Author(s): Chang Liu
Publisher: Prentice Hall
Copyright year: © 2012 Pages: 560
Description

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

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